Where are the large-diameter fused quartz glass tubes made of quartz used?

       Large-diameter quartz glass tubes usually refer to those with an outer diameter of more than 100mm, and even up to 500mm or larger. Due to their unique physical and chemical properties, they have indispensable applications in many high-end industrial and technological fields.

      Lianyungang Shengfan Quartz Product Co.,Ltd is a professional quartz products manufacturer，can be support custom.

      The company matches mature fire processing production lines and R & D team, including large-diameter quartz tube processing production lines, quartz instrument production lines, quartz boat production lines, photovoltaic semiconductor welding parts production lines, etc.The company also equipped with a complete set of cold processing equipment.

       For the large-diameter quartz tube processing production lines,the company can make maximum diameter OD 1000mm. length 5000mm. The diameter tolerance can be make best +/-0.2mm,flatness is +/-0.2mm.

       The main application of large-diameter quartz tubes is:

1.The semiconductor industry:

In chip manufacturing, quartz tubes are the key consumables for processes such as diffusion, oxidation, and annealing.

· Horizontal diffusion furnace tubes: This is the most classic application. Large-diameter quartz tubes serve as the reaction chamber, and silicon wafers are placed inside the tubes. Under high-temperature conditions, special gases (such as oxygen, nitrogen, argon, etc.) are introduced to perform thermal oxidation to form a silicon dioxide layer, or to introduce impurities to modify the electrical properties of the silicon. The diameter of the furnace tubes needs to be large enough to accommodate the "quartz boat" that carries a large number of silicon wafers.

· Vertical tube furnace: With the advancement of technology, the vertical process has become the mainstream. Here, large-diameter quartz tubes serve as the process chambers, and silicon wafers are placed vertically inside the tubes for processes such as LPCVD (Low Pressure Chemical Vapor Deposition) and diffusion. These processes have extremely high requirements for the roundness, verticality and intrinsic quality of the quartz tubes.

2. Photovoltaic industry (solar cell manufacturing)

Similar to the semiconductor industry, it is used for manufacturing solar-grade crystalline silicon cells.